この規格ページの目次
13
K 0154 : 2017 (ISO 18116 : 2005)
14 特殊な試料の取扱方法
14.1 放出ガスが多い試料の予備排気
試料によってはガスを放出して,分析室の真空度を劣化させるため,分析できないものがある。このよ
うな試料は,補助真空室で予備排気を行ってから,試料の分析室への搬送中にガスの混入が多くならない
うちに素早く分析室に搬送することになる。最も簡便な予備排気は,高速導入プローブの付いた試料導入
室で行う。揮発成分を除去すると,試料表面の化学状態が変質することがある。複数の試料を試料室内に
同時に導入すると,試料間で相互汚染が生じることがある。
14.2 粘着性のある液体
粘着性のある液体の分析は,液体を平たんな基板物質上に厚い層状に塗り,その液体の大部分を拭き取
ってからXPSで行うことができる。このような残存試料層は,分析室が要求圧力に達しているときでも,
基板からの信号が検出されないほどの厚さになっていることがある。
14.3 溶質残さ
溶液から抽出した溶質残さを分析する場合には,小さな蒸発皿に溶液を滴下して溶媒を蒸発させること
ができる。溶質残さは蒸発皿に残り,それを分析室へ搬送して分析を行うことになる。
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[4] PANTANO, C.G., D'SOUZA, A.S., and THEN, A.M. Electron beam damage at solid surfaces, in
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Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, CZANDERNA, A.W.,
MADEY, T.E., and POWELL, C. J., eds., Kluwer Academic/Plenum, New York, 1998, pp. 39-96
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[18] SEAH, M.P. and SPENCER, S.J. AES of Bulk Insulators−Control and Characterization of the
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Temperature Bombardment with Hydrogen Particles An AES Investigation on Copper and Fe-Cr-Ni
Steel Surface, Journal of Vacuum Science and Technology, Jan.-Feb. 1978, Vol. 15, No. 1, pp.
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JIS K 0154:2017の引用国際規格 ISO 一覧
- ISO 18116:2005(IDT)
JIS K 0154:2017の国際規格 ICS 分類一覧
JIS K 0154:2017の関連規格と引用規格一覧
- 規格番号
- 規格名称
- JISK0147-1:2017
- 表面化学分析―用語―第1部:一般用語及び分光法に関する用語