ISO 10110-5:2015 光学およびフォトニクス—光学要素およびシステムの図面の作成—パート5：表面形状公差 | ページ 2

Foreword

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The committee responsible for this document is ISO/TC 172, Optics and photonics, Subcommittee SC 1, Fundamental standards.

This third edition cancels and replaces the second edition (ISO 10110-5:2007), which has been technically revised with the following changes:

• a) “nanometres” have been introduced as the standard unit for specifying tolerances for certain types of surface form deviation replacing the former standard unit “fringe spacings”;
• b) expansion of the scope now including surfaces of higher order such as aspheric, non-circular cylindric, and general surfaces;
• c) specification of deviations in tabular form has been added;
• d) a definition of sagitta deviation has been added;
• e) the name of quantity A has been changed to power deviation (reflecting the change in ISO 14999-4). For further details, see 5.2.3, NOTE 3;
• f) an informative Annex B has been added giving a comparison of ISO 10110-5 and ISO 14999-4 regarding corresponding nomenclature, functions, and values.

ISO 10110 consists of the following parts, under the general title Optics and photonics — Preparation of drawings for optical elements and systems:

• Part 1: General
• Part 2: Material imperfections — Stress birefringence
• Part 3: Material imperfections — Bubbles and inclusions
• Part 4: Material imperfections — Inhomogeneity and striae
• Part 5: Surface form tolerances
• Part 6: Centring tolerances
• Part 7: Surface imperfection tolerances
• Part 8: Surface texture; roughness and waviness
• Part 9: Surface treatment and coating
• Part 10: Table representing data of optical elements and cemented assemblies
• Part 11: Non-toleranced data
• Part 12: Aspheric surfaces
• Part 14: Wavefront deformation tolerance
• Part 17: Laser irradiation damage threshold
• Part 19: General description of surfaces and components

Introduction

This part of ISO 10110 refers to deviations in the form (shape) of an optical surface and provides a means of specifying tolerances for certain types of surface form deviation in terms of nanometres.

As it is common practice to measure the surface form deviation interferometrically as the wavefront deformation caused by a single reflection from the optical surface at normal (90° to surface) incidence, it is possible to describe a single definition of interferometric data reduction that can be used in both cases, i.e. in surface form deviation as well as wavefront deformation. As the analysis of most measurements is software based, the deviations are expressed in nanometres. Interferometrical measurements, however, use the unit “fringe spacings”. One “fringe spacing” is equal to a surface form deviation that causes a deformation of the reflected wavefront of one wavelength. A value expressed in nanometres is an indication of the actual height deviation of the surface itself (and not that of the reflected wavefront).

The surface under test, together with the test glass is, for example, such an interferometer. The surface form deviation is represented by the wavefront deformation which is the difference between the wavefront reflected by the actual surface and that reflected by the test glass surface.

Due to the potential for confusion and misinterpretation, nanometres rather than fringe spacings are to be used. Where fringe spacings are used as units, the wavelength is also to be specified.

In addition, tolerances for slope deviations of surfaces can be given in units of mrad, μrad, arcmin, or arcsec.

1 Scope

This International Standard specifies the presentation of design and functional requirements for optical elements and systems in technical drawings used for manufacturing and inspection.

This part of ISO 10110 specifies rules for indicating the tolerance for surface form deviation.

This part of ISO 10110 applies to surfaces of plano, spherical, aspheric, circular and non-circular cylindric, and toric form as well as to surfaces of other non-spherical shape such as generally described surfaces. It does not apply to diffractive surfaces, Fresnel surfaces, and micro-optical surfaces.

2 Normative references

The following referenced documents, in whole or in part, are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 14999-4 and the following apply.

Bibliography