ISO 17973:2016 表面化学分析—中解像度オージェ電子分光計—元素分析のためのエネルギースケールの校正 | ページ 2

Foreword

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The committee responsible for this document is Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 7, Electron spectroscopies.

This second edition cancels and replaces the first edition (ISO 17973:2002), of which it constitutes a minor revision, which includes changing “counts per second” to “counts per channel”.

Introduction

Auger electron spectroscopy (AES) is used extensively for the surface analysis of materials. Elements in the sample (with the exception of hydrogen and helium) are identified from comparisons of the peak energies and peak shapes, with tabulations of peak energies and data in handbooks of spectra for the different elements. To identify the peaks, calibration of the energy scale with an uncertainty of 3 eV is generally adequate, and this International Standard is only intended for work at that level of accuracy (for greater accuracy, see ISO 17974).

The method for calibrating kinetic energy scales specified in this International Standard uses metallic samples of pure copper (Cu) and either aluminium (Al) or gold (Au). It does not include tests for defects in the instrument, since few defects are significant at the level of accuracy concerned.

Traditionally, kinetic energies of Auger electrons have been referenced to the vacuum level, and this reference is still used by many analysts. However, the vacuum level is ill-defined and can vary from instrument to instrument over a range of 0,5 eV. Although use of the vacuum level reference procedure will generally not cause ambiguity in elemental identification, it may cause uncertainty in measurements at high resolution relating to chemical states. Because of this, instruments designed for both Auger electron spectroscopy and X-ray photoelectron spectroscopy reference the kinetic energies to the Fermi level, giving values typically 4,5 eV higher than those referenced to the vacuum level. For the purposes of this International Standard, the user is free to choose the reference appropriate to his or her work.

1 Scope

This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode ここで, the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

2 Normative references

The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 18115 apply.

Bibliography