ISO 22048:2004 表面化学分析—静的二次イオン質量分析の情報フォーマット | ページ 2

Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.

International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.

The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.

Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights.

ISO 22048 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 3, Data management and treatment.

Introduction

ISO 14976 provides a digital data transfer format for surface chemical analysis. That format provides basic information about the data acquisition, but data required for calibration does not specifically include certain detailed aspects necessary to interpret static secondary-ion mass spectrometry (static SIMS) data. That format also contains the spectral data and information about the abscissa increment and its value in the spectrum. Additional data, such as the mass scale calibration data are assembled into information packages with a defined format to be transmitted either within a file conforming to ISO 14976 or separately. In this way, information formats for AES and XPS have been defined in ISO 14975 ^[1] . For static SIMS, it is important to be able to store and transfer the data, as acquired, for instance using the time-of-flight time scale. Each spectrum then needs associated calibration parameters to convert the time scale to a mass scale, where the mass increment in the spectrum varies with mass. The information format defined here contains these data and can be inserted into the block comment lines of ISO 14976. This format is designed to work with ISO 14976 in such a way that software designed to read the latter functions correctly with this information package added. This International Standard is therefore supplementary to and compatible with ISO 14976. The format is also compatible with ISO 14975 and follows a similar structure.

1 Scope

This International Standard provides a digital format to store, and transfer between computers, in a compact way, important calibration and instrumental-parameter data necessary to make effective use of spectral-data files from static SIMS instruments. This format is designed to supplement the data transfer format specified in ISO 14976.

2 Normative references

The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms, definitions and conventions

For the purposes of this document, the terms and definitions given in ISO 14976 and the following terms and definitions apply, as well as the convention, stated at the end of this clause, concerning the use of the decimal sign.

Bibliography