ISO/TR 14997-2:2022 光学とフォトニクス — 光学素子の表面欠陥の試験方法 — Part 2: マシン ビジョン | ページ 2

Foreword

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This document was prepared by Technical Committee ISO/TC 172, Optics and Photonics, Subcommittee SC 1, Fundamental standards.

A list of all parts in the ISO 14997 series can be found on the ISO website.

Introduction

This document was developed to account for the increased use of machine vision for surface quality inspections. The visual assessment of grades of surface imperfections of optical elements and systems is described in ISO 10110-7, and ISO 14997-1 ¹ . The latter gives methods to obtain subjective results using the human eye, reference comparison standards, and in some cases optical magnification tools.

Utilizing machine vision opens the door for the objective evaluation of imperfections as well as electronic data storage of detailed and precise test reports along with statistical data handling. It offers an opportunity for better repeatability of the characterisation of surfaces and a potential method of arbitration in supplier/ customer discussions about surface imperfections.

Inspection results of optics obtained by manual inspection and from already existing machine vision systems have shown good correlation. Minor deviations arise, but are largely due to the differences of subjective and objective evaluation.

Of particular concern can be long scratches such as sleeks. Such imperfections often are more visible when tilting and rotating the sample to the optimum position which, in machine vision devices, is often accomplished by covering an amount of incident illumination angles, which are limited due to practical reasons.

1 Scope

This document provides guidance for the use of machine vision to objectively assess grades of surface imperfections as defined on a drawing using ISO 10110-7 with equivalent results as those obtained by applying the inspector-based methods described in ISO 14997-1.

This document also gives guidelines on how to setup a machine vision device regarding fidelity, repeatability and reproducibility, based on the dark field detection principles of ISO 14997-1.

2 Normative references

The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 10110-7 and ISO 14997-1 and the following apply.

ISO and IEC maintain terminology databases for use in standardization at the following addresses:

Bibliography