ISO/TS 25138:2019 表面化学分析—グロー放電発光分光分析による金属酸化物膜の分析 | ページ 2

Foreword

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This document was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 8, Glow discharge spectroscopy.

This second edition cancels and replaces the first edition (ISO/TS 25138:2010), which has been technically revised. The main changes compared to the previous edition are as follows:

• the element Zr has been added to the Scope;
• the description of the apparatus has been modified to include spectrometers with solid-state array detectors of the types CCD and CID;
• Clause 6 has been modified for more clarity, and to include the spectrometer types;
• Clause 8 has been modified for more clarity, particularly in the recommendations for calibration samples.

A list of all parts in the ISO TS 25138 series can be found on the ISO website.

1 Scope

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

2 Normative references

The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms and definitions

For the purposes of this document, the following terms and definitions apply.

ISO and IEC maintain terminological databases for use in standardization at the following addresses:

Bibliography