ISO 10991:2023 マイクロ流体工学—用語、語彙 | ページ 5

3.1.1

biocompatibility

special quality of some materials allowing them to come into contact with biological materials without changing the materials’ bioactivity

3.1.2

biomarker

biological molecule found in blood, other body fluids or tissues that is used to identify a disease or monitor the progression of a disease

3.1.3

classification

method of sorting into categories

[SOURCE:ISO 5492:2008, 4.5]

3.1.4

end-user

person or persons who will ultimately be using the system (3.1.15) for its intended purpose

[SOURCE:ISO/IEC 19770-5:2015, 3.13, modified — Note 1 to entry has been removed.]

3.1.5

hydrophilic

characterised by affinity to water established by hydrogen bonding

3.1.6

hydrophobic

characterised by being repelled from a mass of water

3.1.7

interested party

stakeholder

person or organization that can affect, be affected by, or perceive itself to be affected by a decision or activity

[SOURCE:ISO 9000:2015, 3.2.3, modified — EXAMPLE and Note 1 to entry removed.]

3.1.8

interoperability

property permitting diverse systems (3.1.15) or components (3.4.7) to work together for a specified purpose

[SOURCE:IEC 80001-1:2010, 2.11]

3.1.9

macroscale

scale of dimensions of 0,1 mm or greater

[SOURCE:SEMI MS003:2015, 6.59]

3.1.10

microfluidics

manipulation of fluids that are confined in a small volume with at least one dimension smaller than 1 mm

3.1.11

microscale

scale of dimensions between 0,1 × 10^-3 m to 0,1 × 10^-6 m

3.1.12

miniaturization

action of making things on a smaller scale

3.1.13

plug and play

ability to work perfectly when first used or connected, without reconfiguration or adjustment by the user and thereby enabling automatic configuration

3.1.14

wettability

ability of a liquid to spread on a specific solid surface

[SOURCE:ISO 472:2013, 2.1607, modified — wording “(such as an adhesive)” has been deleted and Note 1 to entry has been removed.]

3.1.15

system

group of interacting microfluidic, optical, mechanical or electrical components (3.4.7)

3.1.16

actuating resolution

lowest variation of a physical parameter that can be operated by a system (3.1.15)

3.1.17

capacity

flow rate through a pump at its designed conditions

3.1.18

centrifugal microfluidics

subcategory of microfluidics (3.1.10) utilizing rotation

Note 1 to entry: The fluid flow is mainly controlled by centrifugal-, Euler- and Coriolis- forces.

3.1.19

closed system

system (3.1.15) that uses preloaded manufacturer-specific reagents only

3.1.20

digital microfluidics

subcategory of microfluidics (3.1.10) where discrete quantities of liquid are manipulated individually over a surface

3.1.21

droplet microfluidics

subcategory of microfluidics (3.1.10) manipulating discrete quantities of liquid in a continuous flow

3.1.22

lab-on-a-chip

LoC

highly integrated, microfluidic system (3.1.15) providing analytical or diagnostic functions

3.1.23

open system

system (3.1.15) that requires an external supply of reagents

Note 1 to entry: Such an open system requires microfluidic connection(s).

3.1.24

resolution

smallest change in a quantity being measured that causes a perceptible change in the corresponding measurement indication

3.1.25

sensing resolution

lowest variation of a physical parameter that can be detected by a sensor

3.2.1

actual flow rate

volumetric flow rate of a gas changed to standardized conditions of temperature and pressure

3.2.2

capillarity

capillary action

flowing of liquid through a device without external actuators but only by the surface tension and the adhesive force between liquid and the wetted material

3.2.3

compliance of a fluidic system

increase of a fluidic system’s (3.1.15) internal volume under the effect of pressure

Note 1 to entry: The compliance of a fluidic system is expressed in volume units per pressure units.

3.2.4

dead volume

portion of the internal volume of a system (3.1.15) that is not part of a continuous flow-path

Note 1 to entry: In this context dead signifies unmoving, stagnant, or un-swept. The dead-volume is expressed in volume units.

3.2.5

fall time

time required for a flow to change from a specified high value to a specified low value

Note 1 to entry: Typically, these values are 10% and 90% of the step height. The fall time is expressed in time units.

3.2.6

final steady-state value

average value of the actual flow rate (3.2.1) , after the effects of the input transient have faded to a value equal to or below the intrinsic drift and noise

Note 1 to entry: The final steady-state flow rate value is expressed in volume units or mass units over time units.

[SOURCE:SEMI E17-0600:2000, modified — “flow rate” and"mass units" have been added in Note 1 to entry.]

3.2.7

hold-up volume

volume of fluid required to fill a device before a flow is observed at the point of interest or the outlet

Note 1 to entry: The hold-up volume is expressed in volume units such as mm³ or microlitre.

[SOURCE:SEMI MS003:2015, 6.51, modified — “units” has been added in the Note 1 to entry.]

3.2.8

hydrodynamic resistance

ratio of pressure drop over flow rate for a certain component (3.4.7) or system (3.1.15)

Note 1 to entry: The hydrodynamic resistance is expressed as pressure units per flow rate units.

3.2.9

hydrostatic pressure

pressure that is exerted by a fluid contained within a system (3.1.15) due to the force of gravity

Note 1 to entry: The hydrostatic pressure is expressed in pressure units.

3.2.10

internal volume

maximal total available volume comprised within a fluidic component (3.4.7) , device or system (3.1.15) under normal atmospheric pressure

Note 1 to entry: The internal volume is expressed in volume units such as mm³ or microlitre.

3.2.11

mass flow rate

mass of fluid which passes per unit of time

Note 1 to entry: The mass flow rate is expressed in mass units per time units.

3.2.12

micropump

miniaturized liquid or gas pumping equipment with a capacity (3.1.17) of lower than 1 ml/min

3.2.13

minimal actuating pressure

input pressure required to start moving a fluid through the fluidic component (3.4.7)

Note 1 to entry: Minimal actuating pressure is expressed in pressure units.

3.2.14

pressure drop

difference of pressure between two positions in the flow path

Note 1 to entry: The pressure drop is expressed in pressure units.

3.2.15

reaction time

time interval between the moment of the set point step change and the moment at which the flow reaches x % (below 20 %) of its intended value of rise or fall

Note 1 to entry: Typically, x = 10. The reaction time is expressed in time units.

Note 2 to entry: See also Figure 1.

3.2.16

relative flow stability

coefficient of variation

standard deviation of the flow rate divided by the average flow rate

Note 1 to entry: The relative flow stability is expressed as a percentage.

3.2.17

response time

time interval between the moment of the set point step change and the moment at which the flow reaches y% (above 80 %) of its intended value of rise or fall

Note 1 to entry: Typically, y = 90. The response time is expressed in time units.

Note 2 to entry: See also Figure 1.

3.2.18

rise time

time required for a flow to change from a specified low value to a specified high value

Note 1 to entry: Typically, these values are 10 % and 90 % of the step height. The rise time is expressed in time units.

Note 2 to entry: See also Figure 1.

3.2.19

set point

target flow rate value

Note 1 to entry: See also Figure 1.

3.2.20

settling time

time elapsed from the application of an ideal step input to the time at which the output has been entered and remained within a specified (error) band (3.2.21)

Note 1 to entry: The settling time is expressed in time units.

Note 2 to entry: See also Figure 1.

3.2.21

specified error band

specified band

the difference between the specified most negative and specified most positive deviation from the set point

Note 1 to entry: See also Figure 1.

3.2.22

step response time

time between the set point (3.2.19) step change and the instant when the actual flow first enters the specified band

[SOURCE:SEMI E17-0600:2000, modified — “the instant” has been added.]

3.2.23

swept volume

portion of a volume that is part of the flow path

Note 1 to entry: The swept volume is expressed in volume units.

Note 2 to entry: The swept volume is the internal volume minus the dead volume.

3.2.24

transient overshoot

maximum change in actual flow minus the steady-state change in actual flow expressed as a percentage of the set point (3.2.19) step change

Note 1 to entry: See also Figure 1.

[SOURCE:SEMI E17-0600:2000]

3.2.25

transient undershoot

maximum amount that the actual flow passes beyond the final steady-state value (3.2.6) , in the opposite direction of overshoot, expressed as a percentage of the set point (3.2.19) step change

Note 1 to entry: See also Figure 1.

[SOURCE:SEMI E17-0600:2000, modified — “beyond” added.]

3.2.26

volumetric flow rate

volume of fluid which passes the system (3.1.15) per unit of time

Note 1 to entry: The volumetric flow rate is expressed in volume units per time units.

Figure 1 — Schematic showing flow control terms related to a step change in flow

Key

1	set point (100 % rise)	7	initial set point (0 %)
2	specified (error) band	8	reaction time
3	transient overshoot	9	rise time
4	transient undershoot	10	response time
5	y % rise	11	setting time
6	x % rise

3.3.1

first-level connection

direct connection

connection enabling liquid transfer between two parts through direct contact (without tubes (3.4.24) )

3.3.2

second-level connection

indirect connection

connection enabling liquid transfer between two parts using tubes (3.4.24) , syringes, O‑rings, gaskets (3.3.13) and other type of connections (chip to tube)

3.3.3

adhesive connection

connection by a length of tubing bonded to a port on the microfluidic device with epoxy or another suitable adhesive

3.3.4

connector

component (3.4.7) that allows one part of the set to be connected to another

3.3.5

dynamic seal

sealing device used between parts that have relative motion

[SOURCE:ISO 5598:2020, 3.2.241]

3.3.6

edge exclusion

area on the edge of the top or bottom surface that should be excluded from certain features or is reserved for certain features or functions

3.3.7

exclusion area

area on the chip besides the mating area (3.3.19) that is used to create a microfluidic connection

3.3.8

ferrule

metal, polymer or elastomer ring, tube (3.4.24) or cap, (or multiple arrangements thereof) placed at or fastened to the end of a tube that, when pressed against a suitable mating interface with a threaded fitting, or other clamping device, will facilitate a fluid connection

3.3.9

ferrule connection

connection enabling liquid transfer between a tube (3.4.24) and a device or component (3.4.7) using a ferrule (3.3.8)

3.3.10

flared connection

flanged connection

connection enabling liquid transfer between a tube (3.4.24) and a chip with the flattened surface of a tube pressed against the flat surface of a chip

3.3.11

fluidic adapter

physical connector (3.3.4) that links a microfluidic component (3.4.7) to another microscale (3.1.11) or macroscale (3.1.9) fluidic device

[SOURCE:SEMI MS003:2015, 6.45]

3.3.12

free path connection

introducing liquids into an open port on the microfluidic device with the use of an external delivery system (3.1.15)

3.3.13

gasket

mechanical seal that fills the space between two mating interfaces (3.3.20) , generally to prevent leakage from or into the joined parts while under compression

3.3.14

interconnect

connect two things together

3.3.15

LUER connector

small-bore connector (3.3.4) that contains a conical mating interface (3.3.20) , with a 6 % taper intended for use in intravascular or hypodermic applications of medical devices and related accessories

3.3.16

micro- to macroscale sealing

sealing that connects a micrometric scale part with a macrometric scale part

3.3.17

macrosealing

material used in connection at the macroscale (3.1.9) to prevent liquid or gas leakage

3.3.18

macrosealing dimension

flow channel cross section having an effective diameter greater than 100 µm

[SOURCE:SEMI MS003:2015, 6.61]

3.3.19

mating area

mating face

area on the chip that is covered by the seal (3.3.36) or gasket (3.3.13)

3.3.20

mating interface

two areas of one or more parts that are in contact with each other

3.3.21

microfluidic connector

arrangement of components (3.4.7) that facilitate the exchange of fluidics between devices

3.3.22

microfluidic fanout

designed element (3.4.9) that allows reconfigurable routing of any fluid from any of n input ports to any of n output ports without interrupting continuous flow

3.3.23

microsealing

sealing on components (3.4.7) at the microscale (3.1.11)

[SOURCE:SEMI MS003:2015, 6.73]

3.3.24

microsealing dimension

flow channel cross section having an effective diameter of less than 100 µm

[SOURCE:SEMI MS003:2015, 6.74 modified — replaced “<25 micrometers; optionally flow channel cross sections having an effective diameter of 25 to 100 micrometers” by “less than 100 µm”.]

3.3.25

miniLUER connector

small-bore connector (3.3.4) that contains a conical mating interface (3.3.20) with a 6 % taper intended for use to connect microfluidic devices or components (3.4.7) to tubes (3.4.24)

3.3.26

multi-connector

connector (3.3.4) that houses a set of connections

3.3.27

multi-seal

seal (3.3.36) or gasket (3.3.13) that enables a leak-free interface to an array of ports

3.3.28

nipple

metal or polymer cylindrical or cone-shaped device intended to provide interference with the inside surface of an elastomeric tube (3.4.24) , facilitating a fluid connection

3.3.29

nipple-connection

barb connection

connection having a soft wall tubing stretched over a conical or cylindrical shaped device

3.3.30

o-ring connection

elastomer ring of circular cross-section compressed between two components (3.4.7) to prevent fluid leakage

Note 1 to entry: O-ring connection can grip and seal onto a tube.

3.3.31

pitch

mean distance between corresponding features in a regular array of features on a surface

[SOURCE:ISO 18115‑2:2021, 5.106]

3.3.32

port

access point on a chip or device for fluidic contacts

3.3.33

port layout

certain layout in the horizontal plane of a certain type of ports

3.3.34

port pitch

distance between the centres of two adjacent ports

3.3.35

push-in connection

connection where a tube (3.4.24) is pushed into a recess to create interference fit

3.3.36

seal

sub- system (3.1.15) of a connector (3.3.4) comprising a componentor components (3.4.7) arranged at the end of a fluid path and, when typically used with a connector, will retain fluid within a microfluidics system (3.1.15)

3.3.37

side connect width

length of the side of the chip where the side connector (3.3.4) is placed

3.3.38

side connection

connection to the side surface of a device perpendicular to the top surface

3.3.39

static seal

seal that operates with non-moving surfaces

[SOURCE:SEMI MS006:2008, 4.2.20, modified — “seals” changed in “seal”.]

3.3.40

top connection

connection to the top or bottom surface of a device

3.4.1

actuator

device that performs mechanical work using electric energy, chemical energy or other energy forms

[SOURCE:SEMI MS003:2015, 6.3]

3.4.2

assembly

combination of components (3.4.7) and units that form a functional entity

[SOURCE:ISO 10795:2019, 3.23, modified —"parts" has been removed from the definition.]

3.4.3

bubble chamber

part of a bubble trap (3.4.4) to give space for the bubble to be trapped

3.4.4

bubble trap

component (3.4.7) or element (3.4.9) intended to trap bubbles

3.4.5

building block

component (3.4.7) having a standard interface that fits with other building blocks to form a whole system (3.1.15)

3.4.6

cartridge

modular unit designed to be inserted into a larger piece of equipment

Note 1 to entry: A cartridge integrates by assembly several microfluidic components such as pumps, sensors and filters.

3.4.7

component

set of materials, assembled according to defined and controlled processes, which cannot be disassembled without destroying its capability and which performs a simple function that can be evaluated against expected performance requirements

[SOURCE:ISO 10795:2019, 3.48]

3.4.8

device

component (3.4.7) or assembly of components to perform a required function

[SOURCE:ISO 10209:2022, 3.1.29, modified —"component or" has been added before"assembly of components".]

3.4.9

element

part of a microfluidic system (3.1.15) with one main function

3.4.10

filter

microfluidic component (3.4.7) designed to withhold or detain material from fluids or gasses to purify the fluid for use further on in the system (3.1.15)

3.4.11

flow sensor

device (3.4.8) that detects or measures the motion of fluids

[SOURCE:SEMI MS003:2015, 6.44, modified — added “or measures”.]

3.4.12

fluidic circuit board

FCB

fluidic device with microfluidic channels and ports (3.3.32) , and with or without electrical routing and some functionality able to have building blocks connected to it to form a microfluidic system (3.1.15)

3.4.13

function

intended effect of a system (3.1.15) , product or component (3.4.7)

[SOURCE:ISO 10795:2019, 3.110, modified —"subsystem" has been removed,"part" has been changed to"component" and Note 1 to entry has been removed.]

3.4.14

functional element

part of a design that only performs one function

3.4.15

integration

process of physically and functionally combining lower-level functional elements (hardware or software) to obtain a particular functional configuration considered to be of a much higher‑level entity

[SOURCE:ISO 10795:2019, 3.129, modified —"products" has been changed to"functional elements" and"considered to be of a much higher-level entity" was added at the end of the definition.]

3.4.16

micromixer

micro process component (3.4.7) whose primary function is to mix fluid substances

3.4.17

micro process module

micro process component (3.4.7) with standardized component interfaces

3.4.18

microfluidic chip

complex set of integrated fluidic components (3.4.7) and their interconnections on a planar substrate, created by etching, imprinting, moulding etc.

3.4.19

microfluidic chip holder

reusable microfluidic interface that provides at least one microfluidic connection and fixation of the chip

3.4.20

microreactor

device in which (bio)chemical reactions take place in a confinement with at least one lateral dimension below 1 mm

[SOURCE:Chemical Engineering and Chemical Process Technology - Volume III, 2010, modified.]

3.4.21

optical window

opening constructed in an integrated device that functions to admit optical signals to and from a microfluidic chip in the package

3.4.22

reference point

zero point in a two or three-dimensional system (3.1.15)

Note 1 to entry: Distance values in relation to this point give an absolute value in x-, y- or z-direction.

3.4.23

trap

microfluidic element (3.4.9) designed to capture a specific material (sub‑piece such as a cell, protein, etc.) or bubble from a fluid in a precise location

3.4.24

tube

hollow cylinder for transporting a fluid either into or out of a microfluidic system (3.1.15) , or between two microfluidic systems (3.1.15)