ISO 13083:2015 表面化学分析—走査型プローブ顕微鏡法— 2Dドーパントイメージングおよびその他の目的のためのSSRMやSCMなどの電気走査型プローブ顕微鏡（ESPM）の空間分解能の定義とキャリブレーションに関する標準 | ページ 2

Foreword

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The committee responsible for this document is ISO/TC 201, Surface chemical analysis, Subcommittee SC 9, Scanning probe microscopy.

Introduction

Electrical scanning probe microscopy (ESPM) is a branch of scanning probe microscopy (SPM) with the capability of electrical imaging at nanometre spatial resolution. ESPM includes electrostatic force microscopy (EFM), scanning capacitance microscopy (SCM), scanning spreading resistance microscopy (SSRM), etc. Because ESPM can observe electrical or electronic properties with molecule-scale resolution, it is applied to many fields such as semiconductors, displays, etc. However, there has been no standard measurement method for the spatial resolution.

In this International Standard, standardized procedures to determine the spatial (lateral) resolution of SSRM and SCM, which are widely used to image the distribution of carrier and other electrical properties in semiconductor devices, are provided with the use of suitable reference materials. This International Standard uses the sharp-edge method to measure the lateral resolution of ESPM in a similar manner to that already used in measuring the resolution in micro-beam spectroscopy and in depth-profiling measurements with Auger electron spectroscopy and X-ray photoelectron spectroscopy (refer to ISO 18516).

1 Scope

This International Standard describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

2 Normative references

The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 18115-2 and the following apply.

Bibliography