ISO 25178-605:2025 幾何学的製品仕様 (GPS) — 表面テクスチャ:面積 — Part 605:非接触 (ポイント オートフォーカス プローブ) 機器の設計と特性 | ページ 6

3.1

probing system

<point autofocus probe> component of the instrument consisting of an autofocus optical system, an autofocus mechanism (3.6) and an electronic controller

3.2

point autofocus probe

PAP

device that converts the height of a point on a surface into a signal during measurement using the autofocus function

3.3

point autofocus profiling

surface topography measurement method whereby the local surface height is measured by automatically centring a focused light beam reflected from the sample on a position sensitive detector as a function of surface height

[SOURCE:ISO 25178-6:2010, 3.3.11]

3.4

objective

lens that focuses the light source image on the workpiece surface

3.5

autofocus sensor

optical sensor that detects a focal position using the light reflected from the workpiece surface

3.6

autofocus mechanism

autofocus driving mechanism that positions optical elements or the whole optical system

3.7

z-position sensor

sensor that measures the vertical position of the measured point

3.8

working distance

<point autofocus probe> distance along the optical axis between the element closest to the surface and the focus point on the surface

Note 1 to entry: Maximum measurable step height is related to working distance.

3.9

spot size

W_SPOT

<point autofocus probe> size of the light source image focused on the workpiece surface

Note 1 to entry: See Clause B.2.

3.10

focus range

range of z heights, within which it is possible to achieve adequate focus

3.11

vertical range

R_VERT

<point autofocus probe> measuring range of the autofocus probe in z heights within which it is possible to output reliable data

3.12

measurable minimum reflection ratio

M_REF

minimum ratio of the reflected light intensity to the incident light intensity for a measurable workpiece surface

3.13

autofocus repeatability

R_af

measurement repeatability of the autofocus function, excluding the effect of environmental noise

3.14

speckle noise

N_SPC

noise due to non-uniform intensity of reflected light generated by irregular micro-scale geometry of the workpiece surface within the spot size (3.9)

Note 1 to entry: Refer to Reference [10].

3.15

temperature drift deviation

D_TEMx , D_TEMy , D_TEMz

form deviation caused by changes in temperature

Note 1 to entry: This deviation is typically managed by increasing measurement speed and reducing the rate or range of temperature variation.

Note 2 to entry: Refer to Reference [14].

3.16

beam offset direction

direction of the offset of the light source optical axis from the optical axis of the objective (3.4)

Note 1 to entry: See Clause B.4.