ISO 25178-701:2010 幾何学的製品仕様（GPS）—表面テクスチャ：面積—パート701：接触（スタイラス）機器の校正および測定基準 | ページ 2

Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.

International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.

The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.

Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights.

ISO 25178-701 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product specifications and verification.

ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) — Surface texture: Areal:

• Part 2: Terms, definitions and surface texture parameters
• Part 3: Specification operators
• Part 6: Classification of methods for measuring surface texture
• Part 7: Software measurement standards
• Part 601: Nominal characteristics of contact (stylus) instruments
• Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
• Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
• Part 701: Calibration and measurement standards for contact (stylus) instruments

The following parts are under preparation:

• Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
• Part 605: Nominal characteristics of non-contact (point autofocusing) instruments

Introduction

This part of ISO 25178 is a geometrical product specification standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences chain link 6 of the chains of standards on areal surface texture.

For more detailed information of the relation of this standard to the GPS matrix model, see Annex C.

This part of ISO 25178 concerns the areal surface texture measuring instruments for which it defines

• the systematic errors linked with main metrological characteristics of the instrument if they are not given by the manufacturer,
• the calibration operation mode,
• the analysis of the results for the assessment of the potential errors, and
• the decision rules for corrective actions.

It allows the evaluation of the part of the measurement uncertainty which is linked with the metrological characteristics of the instrument and which influences the assessment of areal surface texture parameters.

These metrological characteristics are verified by testing the instrument with the measurement standards defined hereafter or with the measurement standards described in ISO 5436-1 and ISO 5436-2, and with complementary standards like optical flats.

The aim is to assess the errors in the corrected X, Y and Z quantities by using material measurement standards having simple geometry (i.e. optical flat, sphere, etc.) for which

• the uncertainty is lower than for surface texture standards,
• their characteristics are independent of the surface texture parameters.

The calibration procedure reports on the status of the measurement equipment. Depending on the report, the user can decide to perform the corrective actions or to alert the equipment manufacturer.

The method is as follows:

• a) assessment of the errors on the fundamental corrected quantities X, Y and Z;
• b) assessment of the uncertainty due to the mathematical algorithms used for filtering and for computation of parameters, checked with the help of software measurement standards as defined in ISO 5436-2 and ISO 25178-7.

1 Scope

This part of ISO 25178 specifies

• the characteristics of material measures used as measurement standards,
• the estimation methods of the residual errors, and
• the calibration methods and tests for acceptance and periodical re-verification

for areal surface texture contact (stylus) measurement instruments.

2 Normative references

The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms and definitions

For the purpose of this document, the terms and definitions given in ISO 3274, ISO 25178-2, ISO 25178-601 and ISO/IEC Guide 99 apply.

Bibliography