ISO 19668:2017 表面化学分析— X線光電子分光法—均質材料中の元素の検出限界の推定と報告 | ページ 2

Foreword

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This document was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 7, Electron spectroscopies.

Introduction

X-ray photoelectron spectroscopy (XPS) is a technique widely employed to measure the chemical composition of material surfaces. In many applications, it is used to either confirm or deny the presence of an elemental species at a surface. In either case, it is important to understand the minimal concentration of the element that can be detected by XPS under the measurement conditions either to provide an assessment of confidence in a result or to understand how the measurement conditions should be changed to achieve the required detection limit.

This document provides a straightforward approach to calculating detection limits in X-ray photoelectron spectroscopy from experimental data in common analytical situations. It also provides informative annexes which allow the uncertainty in the calculated detection limit to be determined (see Annex A) and describe how the XPS detection limit is defined (see Annex B). Example data and calculations are provided in Annex C. Annex D contains useful conversions and references which describe how detection limits may be estimated for an X-ray photoelectron spectrometer in the absence of any data except that from a reference material such as clean silver.

These calculations are of critical importance because the technique is routinely used to measure the concentration of elements, which are present in low concentrations at a material surface, and knowledge of the limit of detection provides a statement of confidence when no element can be detected. Furthermore, if a particular detection limit is required, it permits the analyst to calculate the acquisition time required to achieve the specified limit of detection.

1 Scope

This document specifies a procedure by which elemental detection limits in X-ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.

2 Normative references

The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 18115-1 and ISO 18115-2 and the following apply.

ISO and IEC maintain terminological databases for use in standardization at the following addresses:

Bibliography