ISO 25178-602:2025 幾何学的製品仕様 (GPS) — 表面テクスチャ:面積 — Part 602:非接触 (共焦点クロマティック プローブ) 機器の設計と特性 | ページ 6

3.1

chromatic aberration

<confocal chromatic probe> optical effect of a lens that focuses light at different lengths depending on the wavelength

Note 1 to entry: Chromatic aberration can be axial (on the optical axis) or lateral (off the optical axis). It is also defined in ISO 10934:2020, 3.1.4.2.

3.2

chromatic objective

objective with axial chromatic aberration (3.1)

3.3

confocal chromatic probe

device that senses surface heights using a chromatic objective (3.2) mounted into a confocal setup

Note 1 to entry: Various optical configurations are discussed in Annex A.

3.4

confocal chromatic microscopy

surface topography measurement method consisting of a confocal microscope with chromatic objective (3.2) integrated with a spectrometer whereby the surface height at a single point is sensed by the wavelength of light reflected from the surface

[SOURCE:ISO 25178-6:2010, 3.3.7, modified — “a detection device (e.g. spectrometer)” has been replaced by “a spectrometer”. Note 1 to entry has been deleted.]

3.5

light source

<confocal chromatic probe> source of light containing a continuum of wavelengths in a predefined spectral region

Note 1 to entry: The spectral region emitted by the source should be compatible with the spectral bandwidth of the optical system and the detector.

Note 2 to entry: Usually, this spectral region extends within the visible light, between wavelength values 0,4 µm to 0,8 µm.

3.6

light source pinhole

small hole placed following the light source (3.5) , to make it a point light source

Note 1 to entry: The system contains two pinholes. The first one is the light source pinhole. It defines a small spot of light that acts as the point light source for the instrument. The second one is the discrimination pinhole (3.7) . It limits the transmitted beam to the part that is in focus on the sample surface and is reflected by it along the optical axis (see Figure A.1).

Note 2 to entry: In practice, the pinholes are obtained by using a fibre optic which provides spatial discrimination and allows the optical head to be used away from the optoelectronic controller.

3.7

discrimination pinhole

small hole placed in front of the detector, providing depth discrimination on a beam reflected from the sample surface by blocking defocused light

Note 1 to entry: Notes 1 and 2 to entry in 3.6 also apply to the discrimination pinhole.

3.8

vertical range

<confocal chromatic probe> distance measured between the focal point of the shortest wavelength and the focal point of the longest wavelength detected on the spectrometer

Note 1 to entry: The vertical range depends on the depth of field and on the spectral range of the spectrometer.

3.9

optical pen

part of a confocal chromatic probe (3.3) that contains a chromatic objective (3.2) and that is located close to the surface during the measurement

Note 1 to entry: The optical pen is usually connected to an opto-electronic box through a fibre optic.

3.10

stray light

signal composed of the stray light entering the discrimination pinhole (3.7) , sensed by the detector when no sample is present, and the internal signal produced by the detector itself

Note 1 to entry: The stray light signal is generally captured during a calibration procedure and subtracted to subsequent measurements.