ISO 27894:2009 真空技術—真空計—熱陰極イオン化ゲージの仕様 | ページ 6

3.1.1

ゲージヘッド

ゲージチューブ

真空にさらされるゲージの部分

注記 1: ISO 3529-3:1981 から適応。

注記2:熱陰極電離真空計のゲージヘッドには、少なくとも陰極またはフィラメント、陽極、イオンコレクタ、および対応する電気真空フィードスルーが含まれています。附属書 A の図 A.1 を参照。

3.1.2

コントロールユニット

コントローラ

電離真空計の一部で、管にエネルギーを与え、電流または電圧を制御および測定し、場合によっては管要素のガス抜き用の電力を供給するために必要な電気回路を構成します。

注記 1これにより、ISO 3529-3:1981 の「ゲージ制御ユニット」の定義が取り消され、置き換えられます。

3.1.3

一体型

アクティブゲージタイプ

送信機の種類

チューブとコントローラが 1 つの機器を形成し、ベーキングのために分離できるゲージ

3.1.4

分離型

パッシブゲージタイプ

チューブとゲージコントローラーがケーブルで接続された別の機器であるゲージ

3.1.5

シングルゲージ

1 つの機器に 1 つのゲージ

3.1.6

複合ゲージ

1 つの機器に複数のゲージ

3.1.7

封筒

3.2.1

sensitivity

sensitivity coefficient

S

Note 1 to entry: This definition cancels and replaces the definition of “ionization gauge coefficient” given in ISO 3529-3:1981. This quantity was formerly also referred to as “gauge constant”.

3.2.2

ionization sensitivity

S₊

Note 1 to entry: This definition cancels and replaces the definition of “sensitivity coefficient”, synonym “sensitivity”, given in ISO 3529-3:1981.

3.2.3

relative sensitivity factor

r_x

Note 1 to entry: Adapted from ISO 3529-3:1981.

3.2.4

correction factor

f_c

3.2.5

relative correction factor

f_{c x/N2}

Note 2 to entry:f_{c x/N2} may depend on the pressure.

3.2.6

warm-up time

time after which the ion gauge reading is stable within a specified value (e.g. 2 %) at a constant pressure after switching on the gauge

Note 1 to entry: There should be no trend in the gauge reading at constant pressure after warm-up time.

3.2.7

residual current

smallest ion collector current that can be obtained when the gauge is operated at its normal operating conditions and at a pressure that is zero or negligible compared with the lower measurement pressure limit of the gauge

Note 1 to entry: The residual current can be measured in a baked-out ultra-high vacuum system with the ionization gauge in the baked-out and degassed condition. The residual pressure is defined as the ion current obtained when the vacuum system has returned to normal room temperature < 30 °C, 48 h after stopping bake-out. The residual current is mainly composed of the X-ray effect, the inverse X-ray effect, the electron-stimulated desorption effect, outgassing and leakage currents from other potentials.

3.2.8

residual current-equivalent pressure

equivalent pressure of nitrogen to the residual current (3.2.7)

Note 1 to entry: The residual current-equivalent pressure is given in pascals (Pa).

3.2.9

internal volume

volume inside the envelope up to the sealing plane minus the volume of the electrodes reaching out of the sealing plane

Note 1 to entry: The internal volume is the volume of the gauge tube exposed to a vacuum system. For a nude gauge, in extreme cases, the internal volume may be negative, when the electrode volumes exceed the volume below the sealing plane.