ISO 29301:2017 マイクロビーム分析—分析電子顕微鏡法—周期的構造を持つ参照物質を使用して画像倍率を較正する方法 | ページ 6

3.1

accuracy

closeness of agreement between a test result and the accepted reference value

Note 1 to entry: A “test result” is the calibrated magnification obtained by the procedure outlined in this document.

Note 2 to entry: The term “accepted reference value” is the magnification given by the TEM manufacturer.

[SOURCE:ISO 5725‑1:1994, 3.6, modified — new Notes 1 and 2 to entry have been added.]

3.2

alignment

series of operations to align the incident direction of the electron beam to the optical axis (3.22) using deflectors and/or mechanical knobs

3.3

certified reference material

CRM

reference material, accompanied by a certificate, one or more of whose property values are certified by a procedure which establishes its traceability to an accurate realization of the unit in which the property values are expressed, and for which each certified value is accompanied by an uncertainty at a stated level of confidence

Note 1 to entry: For the purposes of this document, a CRM possesses periodic structure(s), with the desired range of periodic interval and accuracy, to be used for the calibration of the image magnification (3.15) .

3.4

contamination

formation of a deposited layer of any material due to the interaction of the electron beam with the sample and/or its immediate environment

3.5

crystal orientation

direction of crystal which is represented by crystal index

Note 1 to entry: During TEM imaging, it is often useful to have a crystalline specimen aligned such that a specific (low index) zone axis (3.36) is parallel, or nearly parallel, to the beam direction [ optical axis (3.22) ].

3.6

diffraction grating replica

shadow-casting carbon replica film constituting a grating which contains 500 to 2 000 parallel grooves per millimetre, or cross-line grating with a similar line spacing

Note 1 to entry: A diffraction grating replica can be used as a reference material (3.25) for calibration of the image magnification (3.15) in the low to medium-low magnification range.

3.7

digital camera

device that detects the image (3.13) using a chip-arrayed image sensor (3.18) , such as a charge-coupled device (CCD) or complementary metal-oxide semiconductor (CMOS), that converts a visual image to an electric signal

3.8

dynamic range

range of detectable electron doses illuminated on the detector, in which the image signal can be detected properly

3.9

excitation current

electric current applied to the coil of the magnetic lens

3.10

focus

focusing condition in which the specimen height coincides with the object plane of the objective lens

3.11

glass scale

ruler on which a fine scale is drawn and utilized as the reference scale to measure the distance in the digitized image after digitizing it with an image scanner (3.17)

Note 1 to entry: The transparency and thermal stability of the glass scale are convenient to get the digitized reference image with a transmitted image scanner and to make the contact image on the imaging plate (3.16) .

3.12

horizontal field width

HFW

original length corresponding to full width in the horizontal direction on a magnified image

3.13

image

two-dimensional projection of the specimen structure generated by TEM (3.34)

Note 1 to entry: A photographic film (3.23) , an imaging plate (3.16) , and an image sensor (3.18) built into a digital camera are examples of devices for detecting the image (3.13) .

[SOURCE:ISO 16700:2016, 3.2, modified — the term “SEM” has been replaced by the term “TEM”.]

3.14

image file

computer file containing information relating to the digitized image

3.15

image magnification

ratio of the linear dimension of the specific structure/scaling on the image detector, such as a photographic film (3.23) , an imaging plate (3.16) , and an image sensor (3.18) built into a digital camera, to the corresponding linear dimension of the structure/scaling on the specimen (3.27)

3.16

imaging plate

IP

electron image detector consisting of a film with a thin active layer embedded with specifically designed phosphors

3.17

image scanner

device that converts an analogue image into a digitized image with the desired pixel-resolution

Note 1 to entry: There are mainly two different types of scanners: flatbed type and drum type.

3.18

image sensor

device, such as a charge-coupled device (CCD) array or complementary metal-oxide semiconductor (CMOS) sensor, that converts visual image information to an electric signal, built-in digital camera or other imaging devices

3.19

image wobbler

deflection coil used to change the direction of incident electron beam onto the specimen (3.27)

Note 1 to entry: This coil is activated in a periodic manner with the aim of identifying easily the place of focus (3.10) .

3.20

lattice image

image (3.13) consisting of interference fringes formed by the interaction between the transmitted electron beam and diffracted electron beam from a specific crystal plane

Note 1 to entry: Lattice fringes can be used to calibrate image magnification (3.15) at the high end of the magnification range.

3.21

magnetic hysteresis

physical phenomenon related to the magnetizing loop in which the magnetic field strength depends on the direction of the adjustment of the exciting current for the magnetic lens

3.22

optical axis

straight line passing through the symmetrical centre of the magnetic field of the electron lens

Note 1 to entry: The path of an electron beam along this axis goes through the lens without changing the direction.

3.23

photographic film

negative film

sheet or a roll of thin plastic coated by photographic emulsion for recording an image (3.13)

3.24

pixel-resolution

number of imaging pixels per unit distance of the detector

Note 1 to entry: The typical unit is sometimes expressed as dots per inch (dpi).

3.25

reference material

rm

material or substance, one or more of whose property values are sufficiently homogeneous and well-established to be used for the calibration of an apparatus, the assessment of a measurement method, or for assigning values to materials

Note 1 to entry: For the purpose of this document, an RM possesses periodic pattern(s) with the desired range of periodic interval and accuracy, to be used for the calibration of the image magnification (3.15) .

3.26

region of interest

ROI

region of the image (3.13) selected for a specific reason

3.27

specimen

small portion of a sample for observation

Note 1 to entry: For TEM (3.34) , a specimen has to be thin enough to transmit the electron beam.

3.28

specimen cartridge

part of the specimen holder (3.31) which supports a specimen (3.27) and is attached to the tip of the specimen holder for use

3.29

specimen drift

unintentional movement of the specimen (3.27) due to any source (thermal, mechanical, electric, charging)

3.30

specimen height

specimen position along the optical axis (3.22) of the objective lens

Note 1 to entry: “Specimen height = 0” corresponds to the specimen position in correct focus under the standard excitation condition (3.32) of the objective lens.

Note 2 to entry: See Reference [6].

3.31

specimen holder

device that supports a specimen (3.27) in the right position in the pole-piece gap of the objective lens

3.32

standard excitation condition

setting condition for excitation current to derive the highest performance of the objective lens

Note 1 to entry: Under this condition, specimen height (3.30) shall be set so that the image (3.13) is focused.

Note 2 to entry: This condition is provided by the TEM manufacturer for each instrument.

Note 3 to entry: Image magnification (3.15) is generally measured under this condition; however, as long as reproducible conditions are established, the magnification can be calibrated at any of the instrument settings.

3.33

super-lattice

stable periodic structure which is fabricated by alternating layers of at least two different kinds of materials

Note 1 to entry: The super-lattice can be used as a reference material (3.25) for calibration of image magnification (3.15) from a medium-high to high magnification range.

3.34

transmission electron microscope

TEM

instrument that produces magnified images or diffraction patterns of the specimen (3.27) by an electron beam which passes through the specimen and interacts with it

3.35

under focus

focusing condition in which the specimen height is further from the objective lens than its object plane

3.36

zone axis

crystallographic direction, designated [uvw], defined by the intersection of a number of crystal planes (h₁, k₁, l₁… …h_i, k_i, l_i) such that all of the planes satisfy the so-called Weiss zone law; hu + kv + lw = 0