ISO 3274:1996 幾何学的製品仕様（GPS）—表面テクスチャ：プロファイル法—接触（スタイラス）機器の公称特性 | ページ 6

3.1.1

トレースされたプロファイル

理想的な幾何学的形状 (先端が球面の円錐形) と公称寸法を特徴とするスタイラス先端の中心の軌跡。

注記1：これは、この国際規格で定義された他のすべてのプロファイルの元になるプロファイルです。

3.1.2

参照プロファイル

プローブがガイドに沿って交差平面内で移動するトレース。

注記 1:参照プロファイルの形状は、理論的に正確なプロファイルを実際に実現したものです。その公称偏差は、ガイドの偏差だけでなく、外部および内部の外乱にも依存します。

3.1.3

合計プロファイル

相互に割り当てられた垂直座標と水平座標を使用して、参照プロファイルに相対的なトレース プロファイルのデジタル形式。

注記 1:全体のプロファイルは、垂直方向と水平方向のデジタル ステップによって特徴付けられます。

3.1.4

プライマリ プロファイル

短波長フィルターを適用した後の全プロファイル、 λ

3.1.5

残差プロファイル

理想的に滑らかな平面（オプティカルフラット）をトレースして得られる一次プロファイル。

注記 1:残留プロファイルは、ガイドの偏差、外部および内部の外乱、およびプロファイル伝達の偏差で構成されます。偏差の原因の特定は、特別な装置と適切な環境がなければ、通常は不可能です。

3.2

stylus instrument

Measuring instrument which explores surfaces with a stylus and acquires deviations in the form of a surface profile, calculates parameters and can record the profile (see figure 1).

Note 1 to entry: The diagram as shown represents only the essential operators required in a theoretically exact measuring system. The specific inter-relationship of operators may be subject to design considerations. Therefore figure 1 should not be considered as the only form of theoretically exact configuration.

Figure 1—Schematic representation of a stylus instrument

3.2.1

displacement sensitive, digitally storing stylus instrument

Stylus instrument whose profile presentation contains deviations including long-wave components and set-up deviations.

Note 1 to entry: The profile is digitally stored and, if filtered, is phase-correct filtered. Parameters are digitally calculated and the profile is recorded by means of a graphics system excluding deformation.

3.3.1

measurement loop

Closed chain which comprises all mechanical components connecting workpiece and the stylus tip, e.g. positioning means, workholding fixture, measuring stand, drive unit, probe (pick-up). (See figure 2.)

Note 1 to entry: The measuring loop is subjected to external and internal disturbances and transmits them to the reference profile. The influence of these disturbances depends on the individual measuring set-up, the measuring environment and the skill of the user. The disturbances influence the residual value to a great extent.

3.3.2

reference guide

Component which generates the intersection plane and guides the probe in it on a theoretically exact geometrical trace (reference profile), generally in a straight line.

Note 1 to entry: The guide is an essential part of the drive unit; it can be partially included in the probe. For the use of skids, see annex A.

3.3.3

drive unit

Component which moves the probe along the reference guide and transmits the horizontal position of the stylus tip in the form of a horizontal profile coordinate.

Note 1 to entry: Drive units are characterized by the longest selectable tracing length.

Figure 2—Example of measurement loop of a stylus instrument

3.3.4

probe (pick-up)

Component which contains the tracing element with the stylus tip and the transducer.

3.3.5

tracing element

Element which transmits the stylus tip displacement to the transducer.

3.3.6

stylus tip

Element which consists of a nominally right, circular cone of defined cone angle and of a nominally spherical tip of defined radius.

Note 1 to entry: It is a very important element in profile acquisition when employing stylus instruments.

3.3.7

transducer

Device which converts the vertical coordinates of the traced profile referred to the reference profile into the signal form used in the instrument.

Note 1 to entry: The transducer does not cause an intentional profile modification.

3.3.8

amplifier

Device which effects signal transformation in the instrument without causing any intentional profile modification.

3.3.9

analog-to-digital converter (ADC)

Device which converts the signal form existing in the instrument into digital values.

Note 1 to entry: Together with the corresponding horizontal coordinates, these values form the total profile. The ADC does not cause any intentional profile modification.

3.3.10

data input

Data interface that the instrument may have which allows input of one or more types of profile from an external computer.

3.3.11

data input

data output: Data interface that the instrument may have which allows output of one or more types of profile to an external computer.

3.3.12

profile filtering and evaluation

Operations carried out on the primary, roughness and waviness profiles by means of parameters and characteristic functions according to ISO 4287, ISO 11562, ISO 12085, ISO 13565-1, ISO 13565-2 and ISO 13565-3.

Note 1 to entry: The nominal value of the sampling length is equal to the wavelength cut-off λc.

3.3.13

profile recorder

Recorder that the instrument may have which allows output of one or more types of profile and/or parameter value.

3.4.1

static measuring force

Force exerted by the stylus tip when in its mean position as it rests on the surface.

3.4.2

change of static measuring force

Change of measuring force which occurs when the stylus tip is displaced.

Note 1 to entry: Normally this change is proportional to the displacement.

3.4.3

dynamic measuring force

Force resulting from the acceleration of the stylus tip when continuously tracing the surface.

Note 1 to entry: These dynamic measuring forces are superimposed on the static measuring force.

3.4.4

hysteresis

Difference between the indicated stylus tip displacements for the same actual stylus tip displacement when the stylus tip moves inward and outward.

3.4.5

transmission function for sine waves

Function which, for a given tracing speed, depends both on the wavelength and on the amplitude of the profile to be measured.

3.4.6

measuring range of probe

Vertical range over which the stylus tip and the transducer can acquire displacements within certain limits of permissible error and convert them to signals appropriate for digitization.

3.7.4

measuring range of instrument

Vertical range over which the instrument can acquire displacements within certain limits of permissible error, convert them to signals appropriate for digitization and digitize them.

3.4.8

quantization step of the ADC

Displacement corresponding to the least significant change in the ADC reading.

3.4.9

instrument resolution

Quantitative expression of the ability of the instrument to distinguish meaningfully between closely adjacent positions in the primary profile.

3.4.10

range-to-resolution ratio

Ratio of the measuring range to the instrument resolution.

Note 1 to entry: For instruments having several measuring ranges, the range-to-resolution ratio is calculated for each measuring range individually. Consequently, the range-to-resolution ratio is not the ratio of the largest measuring range to the instrument resolution of the smallest measuring range.

3.4.11

probe linearity deviation

Deviation of the actual characteristic curve from the straight line (or nominal characteristic curve) in the measuring range.

3.4.12

short-wave transmission limitation

Limitation formed by the low pass filter λs which separates out the short-wave signal components of the total profile which by definition do not belong to the primary, roughness or waviness profiles.

Note 1 to entry: It is defined in ISO 4287. The low pass filter can be engineered as a digital filter.

3.4.13

vertical profile component transmission

Transmission characteristic which indicates the amount by which the amplitude of a sinusoidal profile at the transducer is attenuated in the primary profile as a function of its wavelength.

Note 1 to entry: Nominally the wavelength transmission characteristic has the form of the low pass filter according to ISO 11562. It is realized by means of the transducer, amplifier, band limiter and ADC. They do not lead to a profile modification in the passband of wavelengths. The vertical profile transmission can contain other components correcting the primary profile, e.g. alignment corrections, corrections of systematic deviations of the guide, linearity compensation of characteristic curves, etc.

3.4.14

horizontal profile position transmission

Ratio of the difference between the horizontal coordinates of arbitrary position on the total profile to the difference between the corresponding horizontal coordinates of the stylus tip.

3.4.15

deviations of the horizontal position transmission

Difference between the real horizontal profile transmission and the nominal horizontal profile transmission.

3.4.16

deviations of the profile transmission of the primary profile

Deviation between the real profile transmission characteristic of the instrument and the theoretically exact profile transmission of the short-wave band limitation according to ISO 11562.

3.4.17

zero point drift

Change of indicated zero point of the instrument at constant ambient temperature and unchanged stylus position.

Note 1 to entry: A slow unidirectional rate of zero drift has negligible effect on the profile acquisition and none at all on the roughness filtered profile. A cyclical drift may be tolerated for the assessment of the roughness filtered profile, but the drift may have effects on the primary and subsequently obtained waviness filtered profile.

3.4.18

vertical linearity deviation

Overall linearity deviation (from the stylus to the primary profile) from the real vertical transmission characteristic curve from a linear regression line in the vertical direction.

3.4.19

profile filter deviation

Transmission deviation for all wavelengths of the component that are to be used.

3.4.20

profile evaluation deviation

Difference between the value obtained when applying the actual algorithm and the true value for a profile, e.g. the instrument derivation and the true value of the profile from a calibrated specimen such as type D according to ISO 5436.

Note 1 to entry: The true value for a parameter is the value which is obtained when the ideal algorithm for that parameter is applied to the same roughness standard profile.

3.4.21

total deviation of the stylus instrument

Difference, for a defined parameter, between the value determined when evaluating a surface using the given instrument and the true value.

Note 1 to entry: The true value is the value obtained using an ideal instrument as defined in this International Standard.

3.4.22

deviation of the profile recording

Deviation from the digital primary profiles for roughness or waviness and the corresponding output on graphic printers, plotters and monitors.

Note 1 to entry: The horizontal and vertical coordinates of the digital profiles are directly mapped into the pixel coordinates with respect to V_v and V_h. The deviations in both coordinates should be smaller than the pixel spacing of the output device. Additional deviations such as linearity, hysteresis, amplitude and phase errors or overshoots do not occur. The transmission deviations of the recording are practically those of the primary, roughness and waviness profiles.